Rotating vibration type silicon angular rate sensor by deep ICPRIE and XeF<sub>2</sub> gas etching
نویسندگان
چکیده
منابع مشابه
Micro-Coils for MR Spectroscopy by Deep Silicon Etching
A process for batch fabrication of low-cost microcoils for magnetic resonance spectroscopy is demonstrated. Conductors are fabricated on oxidised silicon substrates by electroplating metals inside a deep photoresist mould, and passivated using an epoxy-based resist. Through-wafer deep reactive ion etching is used to define sample volumes and stencil cuts around each die, and dies are separated ...
متن کاملFabrication of p-Type Nano-porous Silicon Prepared by Electrochemical Etching Technique in HF-Ethanol and HF-Ethanol-H2O Solutions
Nano-porous silicon were simply prepared from p-type single crystalline silicon wafer by electrochemical etching technique via exerting constant current density in two different HF-Ethanol and HF-Ethanol-H2O solutions. The mesoporous silicon layers were characterized by field emission scanning electron microscopy and scanning electron microscopy. The results demonstrate that the width of nano-p...
متن کاملStructural and optical properties of n- type porous silicon– effect of etching time
Porous silicon layers have been prepared from n-type silicon wafers of (100) orientation. SEM, FTIR and PL have been used to characterize the morphological and optical properties of porous silicon. The influence of varying etching time in the anodizing solution, on structural and optical properties of porous silicon has been investigated. It is observed that pore size increases with etching tim...
متن کاملCryogenic Deep Reactive Ion Etching of Silicon Micro and Nanostructures
OF DOCTORAL DISSERTATION HELSINKI UNIVERSITY OF TECHNOLOGY P.O. BOX 1000, FI-02015 TKK
متن کاملGas-Surface Dynamics and Profile Evolution during Etching of Silicon.
Scattering of energetic F atoms on a fluorinated Si surface is studied by molecular beam methods. The energy transfer closely follows hard-sphere collision kinematics. Energy and angular distributions of unreacted F atoms suggest significant multiple-bounce scattering in addition to single-bounce scattering and trapping desorption. An empirical model of the atom-surface interaction dynamics is ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 1998
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.118.437